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Leybold dryvac 251 真空系統(tǒng)

我司主營AMAT TEL LAM  MKS SMC VAT等品牌半導體設備，零件。

由于FAB設備的部件型號比較多，不能一 一列舉，如果有其它型號的零部件需要，請隨時聯(lián)系我們。

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我司上海九展自動化技術有限公司致力于為國內(nèi)半導體制造企業(yè)提供快速高效的設備，部件，耗材和維修服務。

我們跟國內(nèi)外多家設備制造商，經(jīng)銷商，零部件貿(mào)易商，晶圓廠，高校，研究所有長期的接觸和聯(lián)系，我們有能力保證品質(zhì)并提供有競爭力的價格。

    Edwards Group Ltd. has introduced the IPUP2, an integrated point-of-use pump for load-lock and transfer chamber applications on Applied Materials’ manufacturing platforms and for use by semiconductor manufacturers.

The second-generation device reduces pump down times by ~50%, uses 70% less energy and requires no maintenance between overhauls. Its power curve and pumping speed (180 m3/h) have been optimized to increase tool throughput. Peak pumping speed is 89% faster than first-generation pumps and down times are up to 54% faster.

The pump includes horizontal and vertical inlets, and its size and configuration enable direct swaps with previous-generation pumps. It has demonstrated a mean time between failures (MTBF to Semi E10 standards) of more than five years with in excess of 3 million load-lock cycles.

The IPUP? 2 is a low energy, compact dry pump system that can be mounted on tool or remotely. It is designed togive extremely low cost of ownership. The IPUP? 2 is intended only for use on clean duty applications. The IPUP? 2is not intended for use with potentially flammable, corrosive, toxic or other hazardous gases since these gases oroxygen can mix within the pump system. Users must complete their own risk assessment and implement anynecessary controls for pumping potentially flammable gases. Edwards can offer advice and assistance in matchingyour pump to your application. If you use the IPUP? 2 system on an application for which it is not intended it mayinvalidate your warrant

Leybold dryvac 251 真空系統(tǒng)

Edwards Group有限公司推出了IPUP2，這是一款集成式使用點泵，用于應用材料制造平臺上的負載鎖定和轉(zhuǎn)移室應用，并供半導體制造商使用。
第二代設備將泵停機時間減少了約50%，能耗減少了70%，大修之間無需維護。其功率曲線和泵送速度（180 m3/h）經(jīng)過優(yōu)化，以提高工具吞吐量。峰值泵送速度比**代泵快89%，停機時間快54%。
該泵包括水平和垂直入口，其尺寸和配置可與上一代泵直接互換。它已經(jīng)證明，平均無故障時間（根據(jù)Semi-E10標準）超過五年，負載鎖定周期超過300萬次。

IPUP?2是一種低能耗、緊湊型干式泵系統(tǒng)，可安裝在工具上或遠程安裝。它的設計使擁有成本極低。IPUP?2*用于清潔應用。IPUP?2不適用于潛在易燃、腐蝕性、有毒或其他危險氣體，因為這些氣體或氧氣可能在泵系統(tǒng)內(nèi)混合。用戶必須完成自己的風險評估，并對泵送潛在易燃氣體實施任何必要的控制。Edwards可以為您的泵與您的應用程序相匹配提供建議和幫助。如果您在不適用的應用程序上使用IPUP?2系統(tǒng)，可能會使您的保修失效

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Leybold dryvac 251 真空系統(tǒng)