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AMAT 0090-02649 DC POWER SUPPLY

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Aeris-G® 等離子體減排系統(tǒng)
人們對全球變暖的認識正在提高，監(jiān)管部門正在全面推動減少全球變暖。認識到這一點，應用材料公司繼續(xù)尋找積極主動、經(jīng)濟高效的方法，以降低所用氣態(tài)化學品（包括全氟化碳化合物 （PFC）、NF3 和 SF6）的高全球變暖潛能值 （GWP）。
應用材料公司的 Aeris-G 系統(tǒng)是一種泵前等離子體減排解決方案，通過處理實際工藝氣體體積（比泵后減排裝置處理的氣體體積更小、更濃縮）來消耗更少的能量。在減排過程中，等離子體解離與Aeris-G腔室中的低氮氣體積相結(jié)合，將NOx排放量降至接近零。Aeris-G 裝置“按需”運行，與耗能的泵減排后連續(xù)運行相比，進一步降低了運營成本。
Aeris-G 系統(tǒng)可以安裝在每個腔室的泵占地面積內(nèi)。它是現(xiàn)有工具安裝的理想選擇，可輕松安裝到現(xiàn)有的排氣管路中，并且只需要電源、氮氣、氧氣、冷卻水和超純水連接。對于新工具安裝，Aeris-G 節(jié)省了晶圓廠空間，減少了公用設施和排氣連接，并最大限度地降低了安裝成本，同時提高了減排效率。
特征
固態(tài)匹配網(wǎng)絡;無活動部件
由專有接口控制，通過腔室處理觸發(fā)操作
過程透明;對泵的使用壽命沒有影響
久經(jīng)考驗的可靠性，正常運行時間>99.9%，售出超過 4,000 臺
好處
幾乎消除了 VOC、COx 和 NOx 排放
提供 CF4 典型值 >95% 的破壞去除效率 （DRE）
提供 >99% 的 DRE，典型值為 SF6、CHF 3、C3F8、NF3、C4F8
降低公用事業(yè)消耗并降低 CoO
零占地面積，無需占地面積
與傳統(tǒng)的濕燒減排相比，減少工廠碳足跡
AMAT 0090-02649 DC POWER SUPPLY

Aeris^®-G Plasma Abatement System

 Awareness of global warming is increasing, and the regulatory push to effect reduction is in full swing. Recognizing this, Applied Materials continues to search for proactive, cost-effective ways of reducing high global-warming potential (GWP) of the gaseous chemicals used, which includes perfluorocarbon compounds (PFCs), NF3 and SF6.

The Applied Aeris-G system is a pre-pump plasma abatement solution that uses less energy by treating the actual process gas volume—a smaller and more concentrated volume than what is treated by post-pump abatement units. The plasma dissociation combined with the low volume of nitrogen in the Aeris-G chamber during abatement minimizes NOx emissions to near zero. The Aeris-G unit operates "on-demand," further reducing operating costs compared to energy-hungry, continuous operation post-pump abatement.

The Aeris-G system can be installed within the pump footprint of each chamber. Ideal for existing tool installations, it easily fits into existing exhaust lines and requires only power, nitrogen, oxygen, cooling water and ultrapure water connections. For new tool installations, Aeris-G saves subfab space, reduces utility and exhaust connections, and minimizes installation costs while improving abatement efficiency.

Features
Solid state match network; no moving parts

Controlled by proprietary interface, triggering operation with chamber processing

Process transparent; no impact to pump lifetime

Proven reliability of >99.9% uptime with over 4,000 units sold

Benefits
Virtually eliminates VOC, COx and NOx emissions

Provides destruction removal efficiency (DRE) >95%, typical for CF4

Provides DRE >99%, typical for SF6, CHF3, C3F8, NF3, C4F8

Lowers utilities consumption and reduces CoO

Offers zero footprint with no floorspace required

Decreases factory carbon footprint compared to traditional burn wet abatement

AMAT 0090-02649 DC POWER SUPPLY